3.Simulation

Simulation of Materials and Sensors

It is difficult to predict how a sensor will react in a magnetic field especially when using combinations of different materials. Instead of really producing and testing all the possible combinations, simulations are used in the CRC to assess the behavior of specific combinations of materials and forms of sensors. That way promising approaches can be identified long before they are actually produced in the clean room.

Magnetic, electric and mechanic properties as well as geometric parameters need to be taken into account to simulate sensors as precisely as possible. Such multiphysics simulations are carried out with analytical methods or with the finite element method. For example, a cantilever sensor is split up into a grid of individual elements. For each element, their electric, magnetic and mechanic differential equations are solved.

There are many parameters influencing the measuring characteristics of a sensor. Its form and size, the stiffness of the material used and the arrangement of the measuring electrodes on the sensor affect the measurement as much as the mounting or the air pressure. Such parameters are merged in one model to be able to analyze their interdependencies. The theoretical models are tested with the measurement data of real sensors.