5.Production

Production of Magnetoelectric Sensors

Clean room of Kiel University (J. Haaks, CAU)

The production of sensors is quite similar to the production of microchips. The main difference is, that the mechanical parts of the sensors are already included in the fabrication process. Ultrapure raw materials ensure that the tiny sensors are working optimally later on. This type of production allows small sensors which can be easily integrated in different measuring systems.

To ensure a high production quality of the sensors, they are made in a clean room. In the clean room of Kiel University a maximum of four particles bigger than 0.5 µm are allowed per liter of air. Therefore, the air is constantly cleaned by complex filter systems. To make sure that as little particles as possible are carried in from the outside people have to wear special protective clothing when entering the clean room.

The production of sensors in the CRC 1261 takes place in two clean rooms. The clean room of the faculty of engineering is development-oriented and allows a wide range of alterations concerning production processes and parameters. The clean room at the partnering Fraunhofer Institute for Silicon Technology (ISIT) in Itzehoe is significantly greater and specialized on the production of larger badges with the aim to prepare series production.