Different Sensor Designs
Cantilever sensors consist of a thin silicon strip with, in the simplest case, two applied layers: One layer is magnetically active, the other one emits a voltage when its shape is changed. If the sensor is now brought into a magnetic field, the magnetic layer deforms and bends the silicon strip. Thereby, the second layer also deforms and emits a measurable voltage signal.
With the Surface Acoustic Wave sensor (SAW) the top layer of a crystal is caused to vibrate in such a way that a wave is created on its surface. A magnetic layer that can change its stiffness is applied on the surface of the crystal. If the sensor is then brought into a magnetic field the magnetic layer influences the propagation of the wave which again can be measured.